Introduction to AMAT 0040-96157
0040-96157 Product Overview
The AMAT 0040-96157 is a high-precision process control module, developed by Applied Materials (AMAT)—the global leader in semiconductor manufacturing equipment and solutions. Specifically engineered for integration into advanced wafer fabrication systems, it serves as a critical control unit for regulating key process parameters in semiconductor manufacturing steps such as plasma etching, physical vapor deposition (PVD), and chemical mechanical planarization (CMP), ensuring consistent nanoscale precision for 5nm and 7nm advanced chip processes. A standout advantage is its seamless compatibility with AMAT’s flagship equipment platforms including Centura Etch, Endura PVD, and Reflexion CMP, leveraging the company’s integrated production system (IMS) architecture to maintain parameter consistency across multi-step processes. Equipped with real-time data acquisition and closed-loop control algorithms, it dynamically adjusts variables like plasma power, gas flow rate, and polishing pressure to compensate for process drift, significantly improving wafer yield—especially critical for high-volume automotive semiconductor and IoT chip production.
0040-96157 Technical Specifications
-
Product Model: 0040-96157
-
Product Type: Semiconductor Process Control Module
-
Core Functions: Plasma process regulation, PVD/CMP parameter control, real-time process monitoring, closed-loop feedback adjustment
-
Control Performance: Parameter control accuracy ±0.01% FS; Response time ≤5ms for process fluctuations; Supports 5nm/7nm advanced wafer processes
-
Input Compatibility: 12×analog inputs (4-20mA) for pressure/gas flow sensors; 8×high-frequency inputs for plasma power monitoring; 4×temperature inputs (PT100 compatible)
-
Output Specifications: 6×analog outputs (4-20mA) for actuator control; 8×PWM outputs for valve regulation; 2×RS-485 outputs for peripheral communication
-
Communication Capability: Supports AMAT IMS protocol, Modbus TCP, Ethernet/IP; Data throughput up to 1Gbps; Compatible with factory MES systems
-
Processing Platform: 32-bit industrial-grade microprocessor; Preloaded with AMAT process control firmware
-
Power Supply: 24V DC ±10% (21.6-26.4V DC); Power consumption ≤12W; Redundant power input support
-
Protection Features: ESD protection (±25kV contact), overvoltage protection, short-circuit protection, EMI shielding (complies with IEC 61000-4)
-
Environmental Adaptability: Operating temperature 18°C to +24°C (cleanroom standard); Humidity 30-50% (non-condensing); Vibration resistance ≤0.5g; Protection rating IP65 (front panel)
-
Mechanical Dimensions: 190mm (W) × 100mm (H) × 75mm (D); Panel mount; Weight ~0.8kg
-
Additional Features: Built-in process data logging (1 million events); Remote firmware update; Process fault alarm (visual/audio)
-
Certifications: CE, UL, SEMI S2/S8 compliant; ISO 9001 certified
Recommended AMAT Products
-
AMAT Centris® Sym3® Y: Advanced plasma etch system that uses 0040-96157 for nanoscale precision control in 5nm chip manufacturing.
-
AMAT Reflexion® 300mm: CMP polishing system whose pressure and speed parameters are regulated by 0040-96157 for copper process optimization.
-
AMAT Endura® PVD: Physical vapor deposition platform that integrates 0040-96157 to control film thickness and uniformity.
-
AMAT Producer® CVD: Chemical vapor deposition system, with 0040-96157 managing gas flow for 3D NAND hard mask deposition.
-
AMAT ICAPS System: Integrated platform for automotive semiconductors, using 0040-96157 to enhance SiC chip performance.
-
AMAT Picosun® ALD: Atomic layer deposition system that collaborates with 0040-96157 for ultra-thin film process control.
-
AMAT Factory Automation Suite: MES integration software that aggregates real-time data from 0040-96157 for fab-wide management.
-
AMAT 0040-96160: Redundant control module that works with 0040-96157 to ensure fault-tolerant operation in critical processes.
There are no reviews yet.