AGILENT 5517C High precision laser interferometer

The Agilent 5517C (now part of Keysight Technologies’ product portfolio) is a high-precision laser interferometer system designed for ultra-accurate measurement and calibration of linear, angular, and dynamic motion in industrial and laboratory environments. It is widely used in applications such as machine tool calibration, coordinate measuring machine (CMM) verification, semiconductor equipment alignment, and precision stage characterization. Below is a detailed overview of its technical specifications and functional capabilities:

Technical Specifications

1. Measurement Capabilities
   • Linear Measurements: 
     • Wavelength: Utilizes a stabilized helium-neon (HeNe) laser with a wavelength of 633 nm.
     • Measurement Range: Up to 80 meters (depending on configuration).
     • Resolution: Sub-nanometer resolution (up to 1 nm in high-resolution mode).
     • Accuracy: ±0.5 ppm (parts per million) for linear displacement.
   • Angular Measurements: 
     • Accuracy: ±0.1 arcseconds (with angular optics kit).
     • Range: ±10 degrees for pitch, yaw, and roll measurements.
   • Straightness/Flatness Measurements: 
     • Accuracy: ±0.3 µm/m for straightness.
2. Laser Source
   • Laser Type: Frequency-stabilized HeNe laser with dual-frequency polarization for enhanced stability.
   • Wavelength Stability: <0.05 ppm (drift per hour).
   • Output Power: ~1 mW (Class II laser product).
3. Dynamic Performance
   • Maximum Velocity: Up to 4 m/s (velocity measurement capability).
   • Acceleration: Supports analysis of systems with accelerations up to 10 m/s².
   • Data Acquisition Rate: Up to 50 kHz (real-time data capture for vibration and dynamic error analysis).
4. Environmental Compensation
   • Built-in Sensors: Temperature, pressure, and humidity sensors for automatic environmental compensation, ensuring accuracy under varying conditions.
   • Material Thermal Expansion Compensation: User-selectable coefficients for materials (e.g., steel, granite).
5. Interfaces and Software
   • Hardware Interfaces: 
     • Analog and digital I/O for synchronization with external equipment.
     • USB/RS-232/GPIB connectivity for data transfer and control.
   • Software Compatibility: 
     • Agilent/Keysight XL-80 software suite for data collection, analysis, and reporting.
     • Supports ISO 230-2, ISO 230-7, and ASME B5.54/B5.57 standards for machine tool testing.
6. Optics and Accessories
   • Modular Optics: Configurable with retroreflectors, beam splitters, angular optics, and straightness/flatness interferometers.
   • Environmental Kits: Air temperature sensors, material temperature sensors, and alignment tools.

Key Functional Applications

1. Machine Tool Calibration
   • Measures and compensates for linear positioning errors, backlash, pitch/yaw/roll angular errors, and hysteresis in CNC machines, lathes, and mills.
2. Coordinate Measuring Machine (CMM) Verification
   • Validates volumetric accuracy, repeatability, and geometric errors (e.g., squareness, straightness).
3. Semiconductor Equipment Alignment
   • Aligns lithography stages, wafer steppers, and robotics with nanometer-level precision.
4. Dynamic Motion Analysis
   • Captures high-speed data to analyze vibration, servo system performance, and settling time.
5. Angle and Flatness Measurement
   • Measures angular positioning of rotary stages, turntables, and straightness of guideways.
6. Laser Doppler Vibrometry
   • Optional modules enable non-contact vibration analysis for research and industrial QA.

Advantages Over Competing Systems

• Ultra-High Accuracy: Sub-ppm uncertainty for critical metrology applications.
• Modularity: Flexible configuration for multi-axis and multi-parameter measurements.
• Real-Time Data Processing: XL-80 software provides instant feedback for error mapping and correction.
• Robustness: Designed for harsh industrial environments with shock/vibration resistance.

The Agilent 5517C remains a gold standard in precision metrology, offering unparalleled accuracy and versatility for industries requiring traceable, high-resolution measurement solutions. Its integration with advanced software and environmental compensation ensures reliable performance even in dynamic or variable conditions.