BROOKS 001-4130-03 Mass Flow Controller Introduction

Product Description

The BROOKS 001-4130-03 is a high-precision mass flow controller (MFC) designed to accurately measure and regulate the flow rate of gases in industrial and laboratory applications. Manufactured by Brooks Instrument, a leading provider of flow measurement and control solutions, this device combines advanced sensor technology with precise control algorithms to deliver reliable performance.

It is engineered to handle a wide range of gas types, offering consistent flow control regardless of variations in pressure or temperature. The MFC features a compact design that allows for easy integration into existing systems, while its robust construction ensures durability even in demanding environments. With user-friendly configuration options and real-time flow monitoring capabilities, the 001-4130-03 provides a versatile solution for applications requiring precise gas flow management.

Product Parameters

Parameter	Specification
Product Type	Mass Flow Controller (MFC)
Manufacturer	Brooks Instrument
Flow Range	[Typical range, e.g., 0-500 sccm (Standard Cubic Centimeters per Minute)]
Gas Compatibility	Multiple gases (configurable for specific gases such as nitrogen, argon, oxygen)
Accuracy	±1% of full scale (typical)
Repeatability	±0.2% of full scale
Response Time	<1 second (90% of setpoint)
Operating Pressure Range	0.5 to 50 psig (inlet pressure)
Operating Temperature Range	5°C to 45°C
Output Signal	4-20 mA analog output (flow rate proportional)
Input Signal	4-20 mA or 0-5 VDC control signal
Power Supply	24 VDC ±10%, 15 W maximum
Communication Interface	Optional RS-485 (Modbus RTU protocol)
Wetted Materials	316 stainless steel, PTFE, Kalrez®
Inlet/Outlet Connections	1/4″ VCR® metal seal fittings

Product Specifications

Physical Specifications

The 001-4130-03 has a compact footprint with dimensions of approximately 152 mm (length) × 76 mm (width) × 102 mm (height), making it suitable for installation in space-constrained environments such as laboratory fume hoods or industrial control panels. It weighs around 1.2 kg, ensuring easy handling during installation and maintenance. The device features a durable aluminum housing with a protective coating, providing resistance to corrosion and mechanical damage.

Electrical Specifications

It operates on a 24 VDC power supply with a maximum power consumption of 15 W, compatible with standard industrial power systems. The MFC accepts either a 4-20 mA or 0-5 VDC control signal for setting the desired flow rate, while the 4-20 mA analog output provides real-time feedback on the actual flow rate. Optional RS-485 communication allows for digital control and monitoring, enabling integration with supervisory control systems.

Performance Specifications

The flow controller delivers high accuracy of ±1% of full scale and excellent repeatability of ±0.2% of full scale, ensuring consistent flow regulation. Its fast response time of less than 1 second ensures rapid adjustment to setpoint changes, critical for dynamic processes. The wetted materials, including 316 stainless steel, PTFE, and Kalrez®, ensure compatibility with corrosive and high-purity gases, making it suitable for applications requiring contamination-free operation.

Series

The 001-4130-03 belongs to Brooks Instrument’s premium line of mass flow controllers, which are renowned for precision and reliability across industries. This series includes a range of models with varying flow ranges, gas compatibilities, and communication options, catering to diverse application needs from low-flow laboratory experiments to high-flow industrial processes. Brooks’ MFC series is characterized by advanced thermal mass flow sensing technology, ensuring direct mass flow measurement independent of pressure and temperature fluctuations.

Features

Precision Flow Control

Equipped with advanced thermal sensing elements and a proportional control valve, the MFC maintains accurate flow rates even with varying inlet pressure and temperature. This precision is critical for applications such as chemical synthesis, where exact gas ratios are required.

Gas Flexibility

The controller can be calibrated for multiple gases, with user-configurable gas profiles allowing quick switching between different gas types without hardware modifications.

Robust Construction

The use of high-quality materials and rugged design ensures long-term reliability in harsh environments, including exposure to corrosive gases and temperature variations.

User-Friendly Operation

Easy-to-access calibration ports and optional digital communication simplify setup and maintenance. The device supports both analog and digital control, providing flexibility for integration into legacy and modern control systems.

Safety Features

Included overpressure protection and leak-tight fittings enhance operational safety, reducing the risk of gas leaks in sensitive applications.

Function

The primary function of the 001-4130-03 is to precisely measure and control the mass flow rate of gases. It operates by using a thermal mass flow sensor to measure the actual flow rate of the gas passing through the device. This measurement is compared to the user-set flow rate (via the input control signal), and the integrated control valve adjusts its opening to maintain the desired flow rate.

The thermal sensor works by heating a small element and measuring the temperature difference between upstream and downstream points; the cooling effect of the gas flow is proportional to its mass flow rate. The control valve modulates continuously to correct any deviations from the setpoint, ensuring stable flow delivery. Real-time flow data is transmitted via the analog output or digital communication, allowing for closed-loop control and process monitoring.

Use

In practical applications, the MFC is installed in the gas line between the gas source and the process chamber. The inlet port connects to the gas supply, while the outlet port links to the process equipment. Users configure the desired flow rate using either an analog control signal (4-20 mA or 0-5 VDC) or digital commands via RS-485.

Calibration is performed using Brooks’ proprietary software or through manual adjustments to match the specific gas type and flow range. Once configured, the controller continuously monitors the flow rate and adjusts the valve position to maintain the setpoint. Regular maintenance involves checking for leaks, verifying calibration, and cleaning the sensor elements if exposed to contaminants.

Application Fields

Semiconductor Manufacturing

Used in deposition processes (CVD, PVD) to control the flow of precursor gases, ensuring uniform thin-film growth and device quality.

Chemical and Pharmaceutical

Precisely regulates gas flows in synthesis reactors and analytical instruments, ensuring accurate reaction stoichiometry and product purity.

Laboratory Research

Ideal for academic and industrial labs requiring precise gas dosing in experiments, catalysis studies, and material science research.

Energy and Environmental

Controls gas flows in fuel cell testing, emissions monitoring, and gas chromatography systems, providing reliable data for energy efficiency and environmental compliance.

Industrial Gases

Manages gas distribution in industrial processes such as heat treatment, welding, and inert gas blanketing, optimizing process efficiency and safety.

In summary, the BROOKS 001-4130-03 mass flow controller is a versatile and reliable device that delivers precise gas flow control for a wide range of applications. Its combination of accuracy, durability, and flexibility makes it an essential tool in industries where precise gas management is critical to process success.